SVETLANA
EXCIMER LASER
Electric discharge excimer KrF- and ArF-laser Svetlana with bestiatron feed system generates the radiation pulses of ultraviolet spectrum. It is intended for technological and research purposes, and also as a part of the environmental control installations.
| Laser medium |
ArF |
KrF |
| Emission wavelength, nano-m |
193 |
248 |
| Maximum pulse power, mJ |
250 |
680 |
| Maximum pulse-repetition rate, Hz |
200 |
300 |
| Maximum average power, W |
40 |
115 |
| Radiation pulse duration (by half-height), nano-sec |
30 |
33 |
| Pumping light section at the resonator outlet, mm |
27x6 |
27x11 |
| Radiation stability, % |
2 |
2 |
| Beam divergence |
4.0x1.5 |
4.0x1.5 |
| Maximum power consumption, kW |
8 |
8 |
