DECOR TWO-CHAMBER VACUUM ARC FACILITY

Field of application:

Commercial deposition of functional coatings: wear-resistant, anti-corrosive, heat-resistant, protective, decorative in aпїЅwide range of colors. Deposition ofпїЅcoatings from various metals and their nitrides, oxides and carbides.

Technical characteristics
Maximum consumed power, kW	100
Background pressure, Pa	6,7 х 10-4
In-chamber heating power, kW	40
Ion cleaning sources, Current, mA	150
Ion cleaning sources, Voltage, kV	5
Arc sources, Current, A	60
Arc sources, Voltage, V	30
Maximum water flow rate, m³/s	3

Publications:

1. M.V. Gordienko, V.V. Ivanov, D.A. Karpov et al., Two-chamber vacuum-arc plant "DECOR" for deposition of functional and decorative coatings. Plasma Devices and Operations, 1997, vol. 5,pp. 227-237.

Deliveries:

Product	Delivery year	Customer	Country
DECOR two-chamber vacuum-arc facility	1994	Svetlana Industrial Association	Russia