ARC SOURCES

Arc plasma sources are efficient in depositing various coatings (anti-corrosive, wear-resistant, heat-resistant, anti-friction, protective, anti-emission, biologically compatible, decorative, etc.).

Arc source of the metallic plasma Multi-component arc source ofпїЅthe metallic plasma

Arc source of the metallic plasma Arc source of the metallic plasma with arc magnetic confinement on the cathode end Multi-component arc source ofпїЅthe metallic plasma

Arc source of the metallic plasma Arc source of boron plasma (with boron cathode)

Arc source of the metallic plasma Arc source of boron plasma (with boron cathode)

Arc source of the metallic plasma without arc control with magnetic arc control

Operating current, A 70 -300 25-300

Operating voltage, V 15 -30 20-40

Evaporation rate of cathode material, mg/s 2 -20 0,5-20

Cathode material reserve, kg 2 -8 0,1-3

These coatings provide the following properties: Arc sources are used for deposition of various coatings

wear-resistant metal

anti-corrosive metal nitride

heat-resistant metal carbide

protective metal oxide

anti-emission semi-conducting structures

decorative diamond-like structures

Publications:

1. D.A. Karpov, Plasma technologies for coating deposition, Novye Promyshlennye Tekhnologii, 2003, issue 1, pp.38-41 (in Russian).

2. D.A. Karpov, Cathodic arc sources and macroparticle filtering, Surface and Coatings Technology, 96 (1997) 22-33.

Deliveries arc sources:

Delivery year Customer Country

1989 Central Institute of Physical Investigations Hungary

1990 Central Institute of Electronic Physics Germany

1992 Ioffe Physical Technical Institute Russia

1992 Vacuum Technique Dresden Germany

1994 Svetlana Industrial Association Russia

1994, 1999 Forschungszentrum Julich Germany

1995-1999 ISM Technology Inc. USA

1997 Forschungszentrum Rossendorf Germany

1999 Multi-Arc Ltd. UK

2004 Chinese Precision Machinery Import and Export Corporation China

2006-2008 NanoShield Co., Ltd. Thailand