EKLAZ
EXCIMER LASER
 |
Eklaz laser is intended:
- for laser microtechnologies (manufacturing of microelectronical products and marking of materials)
- for environmental control installations
- for medical purposes
- for research activities
The laser consists of:
- Irradiator
- Pulse charger
- Gas purifier
- Forevacuum station
| Main parameters | ||
| Emission wavelength, nano-m | 193 | 248 |
| Maximum pulse power (Epulse), mJ | 100 | 300 |
| Maximum pulse-repetition rate, Hz | 100 | 100 |
| Maximum average power, W | 5 | 20 |
| Beam divergence at 0.5 Epulse level | 0.2x0.4 | 0.2x0.4 |
| Maximum power consumption, kW | 3 | 3 |
| Capacity, pulses | 1x108 | 1x108 |
